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Special Gas -> CF4
CF4

CF4

CF4 is a colorless, nonflammable gas.

As a major specialty fluorochemicals, CF4 is applied in many foundational spheres and high-tech areas. In semiconductor process, CF4 is used as an etchant.

Because of its chemical inertia, CF4 is widely used in metal smelting (e.g. the brass, the stainless steel, the carbon steel, the aluminum, the copper, the monel, etc.), plastics (e.g. the viton, the bouma-n, the neoprene, the polyurethane, etc).


QUALITY STANDARD FOR CF4

ITEM UNIT COMPANY STANDARD
CF4 % ≥99.0 ≥99.9 ≥99.99
 N2 v/v ≤3000 ≤300 ≤20
 O2 v/v ≤1000 ≤100 ≤5
H2O v/v ≤10 ≤5 ≤5
CO2 v/v ≤800 ≤10 ≤5
HF v/v   ≤1 ≤0.1
C-F v/v   ≤20 ≤15
SF6 v/v ≤100    
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